Panel Handling LOT Sorter

Semiconductor Substrate Panel Handling EFEM

Ideal Front-End Solution

JR Automation’s Semiconductor Substrate Panel Handling EFEMs are the ideal front-end solution for handling Copper Core, Glass Core and Glass Panels for process modules dedicated to production of High Density Interconnect substrate for semiconductor packages.

Also referred to as Panel Handling LOT Sorters or Panel Loaders/Unloaders, these EFEMs are compliant with SEMI standards and other standards relevant to your products and the requirements of semiconductor manufacturers. They are customizable to meet your specific needs and can handle up to 600 x 600 mm substrate panels.

 

Download the EFEM Brochure
EXCEPTIONALLY BROAD STANDARDS COMPLIANCE

These panel handling EFEMs are compliant with a wide range of SEMI, safety and industry standards for design, communication and operation of equipment used in semiconductor manufacturing:

  • SECS-GEM  (GEM 300)
  • SEMI E84, E181, E181.1, E181.2, E47, E115.1, E30, E37, E37.1, E5, E116, E40, E40.1, E90, E90.1, E94, E94.1, E87, E87.1, F47, S2, S8
  • IPCSMEMA 9851
  • Hermes
  • NFPA79

 

substrate glass panel handling EFEM video
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Substrate Panel EFEM Handling Glass

Substrate Panel EFEM Handling Glass

 

Customizable to meet specific user needs


JR Automation recognizes your needs for flexibility in design and operation. Our panel handling products are the only panel handling EFEMs available worldwide that are customizable for specific user needs.

Three standard product offerings include:

 

Full Panel

Lot Sorter Transfer Tool Full Panel

Quarter Panel

Lot Sorter Transfer Tool Quarter Panel

Full Panel with Thermal Chambers

Lot Sorter Transfer Tool Full Panel With Thermal Chambers


Many functional options may be integrated, including:

 

  • Single lane/dual lane conveyor
  • Rotate modules
  • Flipper modules
  • Heaters
  • Chillers
  • Handoff to multiple process modules within a process tool
  • Multiple load ports
  • Remote air modules to match process equipment environment

 

 

Suitable for handling a variety of panel sizes up to 600 mm x 600 mm

Size

Size Capabilities:

  • Up to 600 x 600 mm full panels
  • Quarter panels
  • 0.2 to 3 mm substrate thicknesses
  • Panel weights up to 2.5 kg
Substrate Types

Substrate Types:

  • Copper core
  • Glass core
  • Glass

 

 

 

 

Superior cleanroom capabilities

Meets

Class 10/ISO 4

Classification standards

Single wire communication capabilities

JR Automation can serve as the single wire SECS/GEM compliant connection to the factory host or provide the required SECS/GEM data to the process equipment via TCP/IP communication in the event the process equipment is the single wire SECS/GEM connection.

 

 

Contact Us

LEARN MORE ABOUT OUR CUSTOMIZABLE EFEM SOLUTION

Contact our team of experts to learn more about how our Semiconductor Substrate Panel Handling EFEMs can work for you.

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